Modeling of metal nanocluster growth on patterned substrates and surface pattern formation under ion bombardment
This thesis addresses the metal nanocluster growth process on prepatterned substrates, the development of atomistic simulation method with respect to an acceleration of the atomistic transition states, and the continuum model of the ion-beam inducing semiconductor surface pattern formation mechanism...
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| Format: | Doctoral Thesis |
| Language: | English |
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Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden
2012
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-88730 http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-88730 http://www.qucosa.de/fileadmin/data/qucosa/documents/8873/Dissertation_Numazawa.pdf |