Development and Simulation Assessment of Semiconductor Production System Enhancements for Fast Cycle Times
Long cycle times in semiconductor manufacturing represent an increasing challenge for the industry and lead to a growing need of break-through approaches to reduce it. Small lot sizes and the conversion of batch processes to mini-batch or single-wafer processes are widely regarded as a promising mea...
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| Format: | Doctoral Thesis |
| Language: | English |
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Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden
2010
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-27343 http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-27343 http://www.qucosa.de/fileadmin/data/qucosa/documents/2734/dissertation_kilian_stubbe.pdf |