Phase transformation in tetrahedral amorphous carbon by focused ion beam irradiation

Phase transformation in tetrahedral amorphous carbon by focused ion beam irradiation

Ion irradiation of tetrahedral amorphous carbon (ta-C) thin films induces a carbon phase transformation from the electrically insulating sp3 hybridization into the conducting sp2 hybridization. In this work, a detailed study on the electrical resistivity and the microstructure of areas, irradiated w...

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Bibliographic Details
Main Author: Philipp, Peter
Other Authors: Technische Universität Dresden, Fakultät Mathematik und Naturwissenschaften
Format: Doctoral Thesis
Language:English
Published: Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden 2014
Subjects:
tetraedrisch amorpher Kohlenstoff
fokussierter Ionenstrahl
Phasentransformation
Graphitisierung
van-der-Pauw
deponierte Energiedichte
tetrahedral amorphous carbon
focused ion beam
phase transformation
graphitization
deposited energy density
ddc:530
rvk:UQ 3400
Online Access:http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-136547
http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-136547
http://www.qucosa.de/fileadmin/data/qucosa/documents/13654/Dissertation_pub.pdf

Internet

http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-136547
http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-136547
http://www.qucosa.de/fileadmin/data/qucosa/documents/13654/Dissertation_pub.pdf

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