Model Building, Control Design and Practical Implementation of a High Precision, High Dynamical MEMS Acceleration Sensor

Model Building, Control Design and Practical Implementation of a High Precision, High Dynamical MEMS Acceleration Sensor

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This paper presents the whole process of building up a high precision, high dynamical MEMS acceleration sensor. The first samples have achieved a resolution of better than 500 micro g and a bandwidth of more than 200 Hz. The sensor fabrication technology is shortly covered in the paper. A theoretica...

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Bibliographic Details
Main Author: Wolfram, Heiko
Language:English
Published: Technische Universität Chemnitz 2005
Subjects:
info:eu-repo/classification/ddc/620
ddc:620
Kapazitiver Sensor
Mathematisches Modell
Regelungstechnik
Acceleration Sensor
H-infinity Control
Identification
Mixed-Sensitivity Approach
Model Building
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200501921
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