Implementation Issues on MEMS - A Study on System Identification

• Main Author: Wolfram, Heiko
• Other Authors: Specht, Hendrik
• Language: English
• Published: Technische Universität Chemnitz 2005
• Subjects: info:eu-repo/classification/ddc/620; ddc:620; Identifikation; Kapazitiver Sensor; MEMS; Mikrospiegel; Nichtlinearität
• Online Access: http://nbn-resolving.de/urn:nbn:de:swb:ch1-200501442; https://monarch.qucosa.de/id/qucosa%3A18393; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-0/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-1/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-10/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-2/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-3/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-4/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-5/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-6/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-7/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-8/; https://monarch.qucosa.de/api/qucosa%3A18393/attachment/ATT-9/

A nonlinear identification scheme is provided for a LTI-system with a feedback-nonlinearity, which depends on the input and LTI-system output. This is especially the case for MEMS, where the electrostatic field depends on the displacement and input voltage. The fact, that the algorithm only requires a matrix inversion and singular value decomposition, makes it possible to use the identification scheme for online-estimation. There is also no other a-priori knowledge about the system, except the order, needed.