Ultra-precision grinding of piezoelectric ceramic thick films for fabrication of pre-stressed bimorph microactuators and development of new numerical models to assess induced thermal stress in multilayer structure
The research programme aims to develop a novel 2.5 dimensional fabrication process for multilayer piezoelectric microactuators. Ultra-precision grinding was used in conjunction with standard micro-fabrication techniques and adhesive bonding technology to create a powerful bimorph structure. The mult...
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| Language: | en |
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Cranfield University
2016
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| Online Access: | http://dspace.lib.cranfield.ac.uk/handle/1826/11000 |