Modélisation et caractérisation de capteurs mécaniques intégrés à base d'hétérostructures A1GaN/GaN pour les environnements hostiles

Modélisation et caractérisation de capteurs mécaniques intégrés à base d'hétérostructures A1GaN/GaN pour les environnements hostiles

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Certains domaines d'applications tels que l'aérospatial, l'automobile ou le forage de haute profondeur peuvent nécessiter la visualisation de certains paramètres physiques dans des environnements hostiles. Les capteurs microélectroniques basés sur le silicium y atteignent souvent leur...

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Bibliographic Details
Main Author:	Vittoz, Stephane
Language:	fra
Published:	Université de Grenoble 2011
Subjects:	[SPI:OTHER] Engineering Sciences/Other [SPI:OTHER] Sciences de l'ingénieur/Autre AlGaN/GaN Pression Déformation HEMT Conditions sévères
Online Access:	http://tel.archives-ouvertes.fr/tel-00858501 http://tel.archives-ouvertes.fr/docs/00/85/85/01/PDF/23582_VITTOZ_2011_archivage.pdf

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