$Isotopic fractionation in sputtering$

Isotopic fractionation in sputtering

Isotopic fractionation due to sputtering has been investigated via a collector type experiment in which targets of known isotopic composition have been bombarded with several keV Ar<sup>+</sup> and Xe<sup>+</sup> ions with fluences down to 3.0x10<sup>14</sup> io...

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Bibliographic Details
Main Author:	Spicklemire, Stephen James
Format:	Others
Published:	1990
Online Access:	https://thesis.library.caltech.edu/8612/2/Spicklemire_sj_1990.pdf Spicklemire, Stephen James (1990) Isotopic fractionation in sputtering. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/XEGH-4365. https://resolver.caltech.edu/CaltechTHESIS:07282014-093054555 <https://resolver.caltech.edu/CaltechTHESIS:07282014-093054555>

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