Micromachined silicone rubber membrane valves for fluidic applications
NOTE: Text or symbols not renderable in plain ASCII are indicated by [...]. Abstract is included in .pdf document. The goal of this thesis is to develop high flow rate, low power consumption valves for micromachined fluid handling systems. It has been identified that large actuation deflection an...
| Main Author: | |
|---|---|
| Format: | Others |
| Language: | en |
| Published: |
1999
|
| Online Access: | https://thesis.library.caltech.edu/773/1/Yang_x_1999.pdf Yang, Xing (1999) Micromachined silicone rubber membrane valves for fluidic applications. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/k8hw-ph10. https://resolver.caltech.edu/CaltechETD:etd-02262008-140740 <https://resolver.caltech.edu/CaltechETD:etd-02262008-140740> |
Internet
https://thesis.library.caltech.edu/773/1/Yang_x_1999.pdfYang, Xing (1999) Micromachined silicone rubber membrane valves for fluidic applications. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/k8hw-ph10. https://resolver.caltech.edu/CaltechETD:etd-02262008-140740 <https://resolver.caltech.edu/CaltechETD:etd-02262008-140740>