Silicon-micromachined flow sensors
NOTE: Text or symbols not renderable in plain ASCII are indicated by [...]. Abstract is included in .pdf document. A new generation of silicon-micromachined or micro-electro-mechanical-system (MEMS) sensors for the general purpose of microflow measurement and control is presented here. The first...
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https://thesis.library.caltech.edu/3153/1/appendix.pdfhttps://thesis.library.caltech.edu/3153/2/chapter1.pdf
https://thesis.library.caltech.edu/3153/3/chapter2.pdf
https://thesis.library.caltech.edu/3153/4/chapter3.pdf
https://thesis.library.caltech.edu/3153/5/chapter4.pdf
https://thesis.library.caltech.edu/3153/6/chapter5.pdf
https://thesis.library.caltech.edu/3153/7/chapter6.pdf
https://thesis.library.caltech.edu/3153/8/Jiang_thesis.pdf
https://thesis.library.caltech.edu/3153/9/title.pdf
Jiang, Fukang (1998) Silicon-micromachined flow sensors. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/R2QN-SC72. https://resolver.caltech.edu/CaltechETD:etd-08172005-081926 <https://resolver.caltech.edu/CaltechETD:etd-08172005-081926>