Properties of piezoresistive silicon nano-scale cantilevers with applications to BioNEMS

Properties of piezoresistive silicon nano-scale cantilevers with applications to BioNEMS

Over the last decade a great deal of interest has been raised in applications of Microelectromechanical Sensors [MEMS] for the detection of biological molecules and to the study of their forces of interaction. Experiments in these areas have included Force Spectroscopy (Chemical Force Microscopy),...

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Bibliographic Details
Main Author: Arlett, Jessica Lynn
Format: Others
Published: 2006
Online Access:https://thesis.library.caltech.edu/1060/1/Jessica-Arlett-thesis-finalversion-Mar2206.pdf
Arlett, Jessica Lynn (2006) Properties of piezoresistive silicon nano-scale cantilevers with applications to BioNEMS. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/1CRV-VC02. https://resolver.caltech.edu/CaltechETD:etd-03222006-125635 <https://resolver.caltech.edu/CaltechETD:etd-03222006-125635>

Internet

https://thesis.library.caltech.edu/1060/1/Jessica-Arlett-thesis-finalversion-Mar2206.pdf
Arlett, Jessica Lynn (2006) Properties of piezoresistive silicon nano-scale cantilevers with applications to BioNEMS. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/1CRV-VC02. https://resolver.caltech.edu/CaltechETD:etd-03222006-125635 <https://resolver.caltech.edu/CaltechETD:etd-03222006-125635>

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