CHARACTERIZATION OF A VISCOELASTIC RESPONSE FROM THIN METAL FILMS DEPOSITED ON SILICON FOR MICROSYSTEM APPLICATIONS
Understanding the mechanisms that control the mechanical behavior of microscale actuators is necessary to design an actuator that responds to an applied actuation force with the desired behavior. Micro actuators which employ a diaphragm supported by torsional hinges which deform during actuation ar...
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| Format: | Others |
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DigitalCommons@CalPoly
2009
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| Online Access: | https://digitalcommons.calpoly.edu/theses/53 https://digitalcommons.calpoly.edu/cgi/viewcontent.cgi?article=1060&context=theses |