A new process chain for producing bulk metallic glass replication masters with micro- and nano-scale features

A new process chain for producing bulk metallic glass replication masters with micro- and nano-scale features

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Yes === A novel process chain for serial production of polymer-based devices incorporating both micro- and nano-scale features is proposed. The process chain is enabled by the use of Zr-based bulk metallic glasses (BMG) to achieve the necessary level of compatibility and complementarity between its...

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Bibliographic Details
Main Authors: Vella, P.C., Dimov, S.S., Brousseau, E., Whiteside, Benjamin R.
Published: 2016
Subjects:
Laser ablation
Focused ion beam milling
Bulk metallic glasses
Process chains
Function and length scale integration
Micro-injection moulding
Focused-ion-beam
Thermoplastic polymers
Pulsed-laser
Surface
Validation
Silicon
Online Access:http://hdl.handle.net/10454/9237

Internet

http://hdl.handle.net/10454/9237

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