Characterization and modification of the mechanical and surface properties at the nanoscale

In the past two decades much effort has been put in the characterization of the mechanical and surface properties at the nano-scale in order to conceive reliable N/MEMS (Nano and Micro ElectroMechanical Systems) applications. Techniques like nanoindentation, nanoscratching, atomic force microscopy h...

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Bibliographic Details
Main Author: Tam, Enrico
Other Authors: Delplancke Marie-Paule
Format: Others
Language:en
Published: Universite Libre de Bruxelles 2009
Subjects:
Online Access:http://theses.ulb.ac.be/ETD-db/collection/available/ULBetd-12022009-101338/