Characterization and modification of the mechanical and surface properties at the nanoscale
In the past two decades much effort has been put in the characterization of the mechanical and surface properties at the nano-scale in order to conceive reliable N/MEMS (Nano and Micro ElectroMechanical Systems) applications. Techniques like nanoindentation, nanoscratching, atomic force microscopy h...
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Format: | Others |
Language: | en |
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Universite Libre de Bruxelles
2009
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Online Access: | http://theses.ulb.ac.be/ETD-db/collection/available/ULBetd-12022009-101338/ |