Electrical Conductivity of the Aluminum Oxide Diffusion Barrier Following Catalytic Carbon Nanotube Growth
Carbon nanotube templated microfabrication (CNT-M) is a method that allows high-aspect ratio structures to be made for microelectromechanical systems (MEMS) devices. One concern when making monolithic electrical devices using CNT-M is that the aluminum oxide diffusion barrier will create too large o...
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| Format: | Others |
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BYU ScholarsArchive
2019
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| Online Access: | https://scholarsarchive.byu.edu/etd/7767 https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=8767&context=etd |