Penetration Depth Variation in Atomic Layer Deposition on Multiwalled Carbon Nanotube Forests
Atomic Layer Deposition (ALD) of Al2O3 on tall multiwalled carbon nanotube forests shows concentration variation with the depth in the form of discrete steps. While ALD is capable of extremely conformal deposition in high aspect ratio structures, decreasing penetration depth has been observed over m...
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| Format: | Others |
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BYU ScholarsArchive
2018
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| Online Access: | https://scholarsarchive.byu.edu/etd/7124 https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=8124&context=etd |