Design and Analysis of End-Effector Systems for Scribing on Silicon
This thesis investigates end-effector systems used in a chemomechanical scribing process. Chemomechanical scribing is a method of patterning silicon to selectively deposit a monolayer of material on the surface of the silicon. This thesis details the development of a unique end-effector for chemomec...
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| Format: | Others |
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BYU ScholarsArchive
2003
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| Online Access: | https://scholarsarchive.byu.edu/etd/95 https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=1094&context=etd |