Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process

We demonstrate a damascene process for fabricating amorphous silicon (a-Si), single-mode optical channel waveguides and high-Q racetrack resonators. This process is compatible with thermal budget limitations for a-Si phase stability. It offers improved optical transmission and facilitates hydrogen e...

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Bibliographic Details
Main Authors: Sun, Rong (Contributor), Cheng, Jing (Contributor), Michel, Jurgen (Contributor), Kimerling, Lionel C. (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor), Massachusetts Institute of Technology. Microphotonics Center (Contributor)
Format: Article
Language:English
Published: Optical Society of America, 2013-10-04T13:45:22Z.
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