Control of buckling in large micromembranes using engineered support structures
In this paper we describe a general method to avoid stress-induced buckling of thin and large freestanding membranes. We show that using properly designed supports, in the form of microbeams, we can reduce the out-of-plane deflection of the membrane while maintaining its stiffness. As a proof of pri...
| Main Authors: | , , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing,
2013-10-01T17:42:40Z.
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| Subjects: | |
| Online Access: | Get fulltext |