Photo-induced trimming of chalcogenide-assisted silicon photonic circuits

Photo-induced trimming of chalcogenide-assisted silicon photonic circuits

We present an innovative and efficient technique for post-fabrication trimming of silicon photonic integrated circuits (PICs). Our approach exploits the high photosensitivity of chalcogenide glasses (ChGs) to induce local and permanent modifications of the optical properties and spectral responses o...

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Bibliographic Details
Main Authors: Melloni, Andrea (Author), Grillanda, Stefano (Author), Canciamilla, Antonio (Author), Ferrari, Carlo (Author), Morichetti, Francesco (Author), Strain, Michael (Author), Sorel, Marc (Author), Singh, Vivek (Contributor), Agarwal, Anuradha Murthy (Contributor), Kimerling, Lionel C. (Contributor)
Other Authors: MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor)
Format: Article
Language:English
Published: SPIE, 2013-09-26T17:03:46Z.
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