Monolithic III-V/Si Integration
We summarize our work on creating substrate platforms, processes, and devices for the monolithic integration of silicon CMOS circuits with III-V optical and electronic devices. Visible LEDs and InP HBTs have been integrated on silicon materials platforms that lend themselves to process integration w...
Format: | Article |
---|---|
Language: | English |
Published: |
Institute of Electrical and Electronics Engineers (IEEE),
2013-09-24T17:53:03Z.
|
Subjects: | |
Online Access: | Get fulltext |