Etching of Graphene Devices with a Helium Ion Beam
We report on the etching of graphene devices with a helium ion beam, including in situ electrical measurement during lithography. The etching process can be used to nanostructure and electrically isolate different regions in a graphene device, as demonstrated by etching a channel in a suspended grap...
| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society (ACS),
2013-01-10T21:55:03Z.
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| Subjects: | |
| Online Access: | Get fulltext |