Measurement and analysis of contact plug resistance variability
The impact of contacts on device and circuit performance is becoming larger with technology scaling because of higher resistance as well as increased variability. Thus, techniques are needed for measurement, analysis, and modeling of variation in contacts, and for devices, interconnects, and circuit...
| Main Authors: | , |
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| Other Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers,
2010-04-08T15:30:29Z.
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| Subjects: | |
| Online Access: | Get fulltext |