Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

© 2021 BMJ Publishing Group. All rights reserved. A process flow is described for the low cost, flexible fabrication of metal micro-electromechanical systems (MEMS) with high performance integrated sensing. The process is capable of producing new designs in ≈1 week at an average unit cost of <1 k...

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Bibliographic Details
Main Authors: Panas, Robert M (Author), Culpepper, Martin (Author)
Format: Article
Language:English
Published: ASME International, 2021-12-16T20:36:21Z.
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