Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact

Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact

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National Science Foundation (U.S.) (CA No. EEC-1041895)

Bibliographic Details
Main Authors: Laine, Hannu S. (Author), Vahlman, Henri (Author), Haarahiltunen, Antti (Author), Jensen, Mallory Ann (Author), Modanese, Chiara (Author), Wagner, Matthias (Author), Wolny, Franziska (Author), Buonassisi, Anthony (Author), Savin, Hele (Author)
Other Authors: Massachusetts Institute of Technology. Department of Mechanical Engineering (Contributor)
Format: Article
Language:English
Published: Author(s), 2021-12-13T17:00:56Z.
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Online Access:Get fulltext

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