Vertically integrated modeling of light-induced defects: Process modeling, degradation kinetics and device impact

• Main Authors: Laine, Hannu S. (Author), Vahlman, Henri (Author), Haarahiltunen, Antti (Author), Jensen, Mallory Ann (Author), Modanese, Chiara (Author), Wagner, Matthias (Author), Wolny, Franziska (Author), Buonassisi, Anthony (Author), Savin, Hele (Author)
• Other Authors: Massachusetts Institute of Technology. Department of Mechanical Engineering (Contributor)
• Format: Article
• Language: English
• Published: Author(s), 2021-12-13T17:00:56Z.
• Subjects: Article
• Online Access: Get fulltext

National Science Foundation (U.S.) (CA No. EEC-1041895)