Comparison of Radio-Frequency Power Architectures for Plasma Generation
Applications such as plasma generation require the generation and delivery of radio-frequency (rf) power into widely-varying loads while simultaneously demanding high accuracy and speed in controlling the output power across a wide range of power levels. Attaining high efficiency and performance acr...
| Main Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE),
2021-03-08T20:28:31Z.
|
| Subjects: | |
| Online Access: | Get fulltext |