A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy
In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrys...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Elsevier BV,
2020-02-28T19:37:49Z.
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| Subjects: | |
| Online Access: | Get fulltext |