Nano-beam and nano-target effects in ion radiation

Nano-beam and nano-target effects in ion radiation

Full three dimensional (3D) simulations of ion implantation are necessary in a wide range of nanoscience and nanotechnology applications to capture the increasing effect of ion leakage out of surfaces. Using a recently developed 3D Monte Carlo simulation code IM3D, we first quantify the relative err...

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Bibliographic Details
Main Authors: Berggren, Karl K. (Author), Yang, Yang (Contributor), Li, Yonggang (Contributor), Short, Michael P (Contributor), Kim, Chungsoo (Contributor), Li, Ju (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Nuclear Science and Engineering (Contributor), Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor), Short, Michael Philip (Contributor)
Format: Article
Language:English
Published: Royal Society of Chemistry, 2019-02-13T18:08:17Z.
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