Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS

Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS

Recent advances in the field of two-dimensional (2D) transition metal dichalcogenide (TMD) materials have indicated that atomic layer deposition (ALD) of the metal oxide and subsequent sulfidation could offer a method for the synthesis of large area two-dimensional materials such as MoS 2 with excel...

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Bibliographic Details
Main Authors: Bertuch, Adam (Author), Provine, J. (Author), Sundaram, Ganesh (Author), Ferralis, Nicola (Contributor), Grossman, Jeffrey C. (Contributor), Keller, Brent D. (Contributor)
Other Authors: Massachusetts Institute of Technology. Center for Materials Science and Engineering (Contributor)
Format: Article
Language:English
Published: American Chemical Society (ACS), 2018-04-20T18:25:02Z.
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