Resonance-enhanced waveguide-coupled silicon-germanium detector

A photodiode with 0.55 ± 0.1 A/W responsivity at a wavelength of 1176.9 nm has been fabricated in a 45 nm microelectronics silicon-on-insulator foundry process. The resonant waveguide photodetector exploits carrier generation in silicon-germanium within a microring which is compatible with high-perf...

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Bibliographic Details
Main Authors: Alloatti, Luca (Contributor), Ram, Rajeev J (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor)
Format: Article
Language:English
Published: American Institute of Physics (AIP), 2017-08-14T13:40:16Z.
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Online Access:Get fulltext
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100 1 0 |a Alloatti, Luca  |e author 
100 1 0 |a Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science  |e contributor 
100 1 0 |a Massachusetts Institute of Technology. Research Laboratory of Electronics  |e contributor 
100 1 0 |a Alloatti, Luca  |e contributor 
100 1 0 |a Ram, Rajeev J  |e contributor 
700 1 0 |a Ram, Rajeev J  |e author 
245 0 0 |a Resonance-enhanced waveguide-coupled silicon-germanium detector 
260 |b American Institute of Physics (AIP),   |c 2017-08-14T13:40:16Z. 
856 |z Get fulltext  |u http://hdl.handle.net/1721.1/110934 
520 |a A photodiode with 0.55 ± 0.1 A/W responsivity at a wavelength of 1176.9 nm has been fabricated in a 45 nm microelectronics silicon-on-insulator foundry process. The resonant waveguide photodetector exploits carrier generation in silicon-germanium within a microring which is compatible with high-performance electronics. A 3 dB bandwidth of 5 GHz at −4 V bias is obtained with a dark current of less than 20 pA. 
520 |a United States. Defense Advanced Research Projects Agency (HR0011-11-C-0100) 
520 |a United States. Defense Advanced Research Projects Agency (contract HR0011-11-9-0009) 
546 |a en_US 
655 7 |a Article 
773 |t Applied Physics Letters