Indirect Wafer Bonding and Epitaxial Transfer of GaSb-Based Materials
Results from a study of indirect wafer bonding and epitaxial transfer of GaSb-based materials are presented. Benzocyclobutene (BCB) was used as a bonding agent to bond GaSb and epitaxial structures lattice matched to GaSb onto Si, GaAs, and sapphire carrier substrates. To better understand sources o...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Springer US,
2017-01-27T18:00:02Z.
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| Subjects: | |
| Online Access: | Get fulltext |