Precision positioning using a novel six axes compliant nano-manipulator
In this paper, a novel micro-scale nano-manipulator capable of positioning in six degrees of freedom (DOF) is introduced. Undesired deflections, while operating in a specific DOF, are restricted by the aid of distinctive design of flexure hinges and actuators' arrangements. The compliant mechan...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
Springer Berlin Heidelberg,
2016-12-22T15:11:50Z.
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| Subjects: | |
| Online Access: | Get fulltext |