Multilayer block copolymer meshes by orthogonal self-assembly

Multilayer block copolymer meshes by orthogonal self-assembly

Continued scaling-down of lithographic-pattern feature sizes has brought templated self-assembly of block copolymers (BCPs) into the forefront of nanofabrication research. Technologies now exist that facilitate significant control over otherwise unorganized assembly of BCP microdomains to form both...

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Bibliographic Details
Main Authors: Alexander-Katz, Alfredo (Contributor), Ross, Caroline A. (Contributor), Berggren, Karl K. (Contributor), Tavakkoli Kermani Ghariehali, Amir (Contributor), Nicaise, Sam (Contributor), Gadelrab, Karim Raafat (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor)
Format: Article
Language:English
Published: Nature Publishing Group, 2016-03-25T13:57:22Z.
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