Characterisation of nanocrystalline diamond coating deposited via hot filament chemical vapour deposition method with various seeding methods
A nanocrystalline diamond bilayer has been deposited via hot filament chemical vapour deposition method. The bilayer has been produced by two different deposition parameters. The first is by limiting microcrystalline diamond growth and the second layer by pulsing additional oxygen gas into the syste...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penerbit UTM Press,
2015-08-24.
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| Subjects: | |
| Online Access: | Get fulltext |