Image reversal resist photolithography of silicon-based platinum and silver microelectrode pattern

Silicon-based platinum (Pt) and silver (Ag) microelectrodes are constructed using photolithography technique and used in detecting arsenic activity in different electrolytes. Pt and Ag have good properties either as a working, a counter, or a reference electrode due to their low electrical resistanc...

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Bibliographic Details
Main Authors: Nurulhaidah Daud (Author), Nor Farhah Razak (Author), Normahirah Nek Abd Rahman (Author), Azizah Mohd Zahidi (Author), Chin, Siew Xian (Author), Tengku Elmi Azlina Tengku Muda (Author)
Format: Article
Language:English
Published: Penerbit Universiti Kebangsaan Malaysia, 2021-02.
Online Access:Get fulltext

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