Surface morphological, topological and crystallinity characteristics of sputtered barium strontium titanate thin films on sapphire substrates / F.W. Jamaluddin ... [et al.]

This paper presents the material characterization of barium strontium titanate (Ba0.5Sr0.5TiO3) thin films grown on sapphire substrates. The films were deposited by radio frequency (RF) magnetron sputtering system for 2, 3 and 4 hours on sapphire substrates, achieving film thicknesses of approximate...

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Bibliographic Details
Main Authors: Jamaluddin, F.W (Author), Abdul Khalid, M. F. (Author), Mahmood, M.K.A (Author), Mamat, M. H. (Author), Zoolfakar, A.S (Author)
Format: Article
Language:English
Published: Universiti Teknologi MARA, 2019-12.
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