A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO<sub>3</sub>; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (<i>Q</i>) was enhanced to 508 an...

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Bibliographic Details
Main Authors: Savannah R. Eisner, Cailin A. Chapin, Ruochen Lu, Yansong Yang, Songbin Gong, Debbie G. Senesky
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Sensors
Subjects:
lithium niobate
RF MEMS
piezoelectric resonators
high-temperature
SH0 mode
Online Access:https://www.mdpi.com/1424-8220/21/1/149

Internet

https://www.mdpi.com/1424-8220/21/1/149

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