Ultralow-Noise SiN Trampoline Resonators for Sensing and Optomechanics
In force sensing, optomechanics, and quantum motion experiments, it is typically advantageous to create lightweight, compliant mechanical elements with the lowest possible force noise. Here, we report the fabrication and characterization of high-aspect-ratio, nanogram-scale Si_{3}N_{4} “trampolines”...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
American Physical Society
2016-04-01
|
| Series: | Physical Review X |
| Online Access: | http://doi.org/10.1103/PhysRevX.6.021001 |