Controlled Sputtering Pressure on High-Quality Sb<sub>2</sub>Se<sub>3</sub> Thin Film for Substrate Configurated Solar Cells

Magnetron sputtering has become an effective method in Sb<sub>2</sub>Se<sub>3</sub> thin film photovoltaic. Research found that post-selenization treatments are essential to produce stoichiometric thin films with desired crystallinity and orientation for the sputtered Sb<s...

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Main Authors: Rong Tang, Xingye Chen, Yandi Luo, Zihang Chen, Yike Liu, Yingfen Li, Zhenghua Su, Xianghua Zhang, Ping Fan, Guangxing Liang
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/10/3/574
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spelling doaj-fbb8d17b58f042d99a8a8f08f5ae05512020-11-25T02:32:09ZengMDPI AGNanomaterials2079-49912020-03-0110357410.3390/nano10030574nano10030574Controlled Sputtering Pressure on High-Quality Sb<sub>2</sub>Se<sub>3</sub> Thin Film for Substrate Configurated Solar CellsRong Tang0Xingye Chen1Yandi Luo2Zihang Chen3Yike Liu4Yingfen Li5Zhenghua Su6Xianghua Zhang7Ping Fan8Guangxing Liang9Shenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaShenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaShenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaShenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaSchool of Material and Metallurgical Engineering, Guizhou Institute of Technology, Guiyang 550003, ChinaSchool of Material and Metallurgical Engineering, Guizhou Institute of Technology, Guiyang 550003, ChinaShenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaISCR (Institut des Sciences Chimiques de Rennes) UMR 6226, CNRS, Univ. Rennes, 35042 Rennes, FranceShenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaShenzhen Key Laboratory of Advanced Thin Films and Applications, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, ChinaMagnetron sputtering has become an effective method in Sb<sub>2</sub>Se<sub>3</sub> thin film photovoltaic. Research found that post-selenization treatments are essential to produce stoichiometric thin films with desired crystallinity and orientation for the sputtered Sb<sub>2</sub>Se<sub>3</sub>. However, the influence of the sputtering process on Sb<sub>2</sub>Se<sub>3</sub> device performance has rarely been explored. In this work, the working pressure effect was thoroughly studied for the sputtered Sb<sub>2</sub>Se<sub>3</sub> thin film solar cells. High-quality Sb<sub>2</sub>Se<sub>3</sub> thin film was obtained when a bilayer structure was applied by sputtering the film at a high (1.5 Pa) and a low working pressure (1.0 Pa) subsequently. Such bilayer structure was found to be beneficial for both crystallization and preferred orientation of the Sb<sub>2</sub>Se<sub>3</sub> thin film. Lastly, an interesting power conversion efficiency (PCE) of 5.5% was obtained for the champion device.https://www.mdpi.com/2079-4991/10/3/574thin film solar cellsb<sub>2</sub>se<sub>3</sub>magnetron sputteringworking pressurepost-selenizationsubstrate configuration
collection DOAJ
language English
format Article
sources DOAJ
author Rong Tang
Xingye Chen
Yandi Luo
Zihang Chen
Yike Liu
Yingfen Li
Zhenghua Su
Xianghua Zhang
Ping Fan
Guangxing Liang
spellingShingle Rong Tang
Xingye Chen
Yandi Luo
Zihang Chen
Yike Liu
Yingfen Li
Zhenghua Su
Xianghua Zhang
Ping Fan
Guangxing Liang
Controlled Sputtering Pressure on High-Quality Sb<sub>2</sub>Se<sub>3</sub> Thin Film for Substrate Configurated Solar Cells
Nanomaterials
thin film solar cell
sb<sub>2</sub>se<sub>3</sub>
magnetron sputtering
working pressure
post-selenization
substrate configuration
author_facet Rong Tang
Xingye Chen
Yandi Luo
Zihang Chen
Yike Liu
Yingfen Li
Zhenghua Su
Xianghua Zhang
Ping Fan
Guangxing Liang
author_sort Rong Tang
title Controlled Sputtering Pressure on High-Quality Sb<sub>2</sub>Se<sub>3</sub> Thin Film for Substrate Configurated Solar Cells
title_short Controlled Sputtering Pressure on High-Quality Sb<sub>2</sub>Se<sub>3</sub> Thin Film for Substrate Configurated Solar Cells
title_full Controlled Sputtering Pressure on High-Quality Sb<sub>2</sub>Se<sub>3</sub> Thin Film for Substrate Configurated Solar Cells
title_fullStr Controlled Sputtering Pressure on High-Quality Sb<sub>2</sub>Se<sub>3</sub> Thin Film for Substrate Configurated Solar Cells
title_full_unstemmed Controlled Sputtering Pressure on High-Quality Sb<sub>2</sub>Se<sub>3</sub> Thin Film for Substrate Configurated Solar Cells
title_sort controlled sputtering pressure on high-quality sb<sub>2</sub>se<sub>3</sub> thin film for substrate configurated solar cells
publisher MDPI AG
series Nanomaterials
issn 2079-4991
publishDate 2020-03-01
description Magnetron sputtering has become an effective method in Sb<sub>2</sub>Se<sub>3</sub> thin film photovoltaic. Research found that post-selenization treatments are essential to produce stoichiometric thin films with desired crystallinity and orientation for the sputtered Sb<sub>2</sub>Se<sub>3</sub>. However, the influence of the sputtering process on Sb<sub>2</sub>Se<sub>3</sub> device performance has rarely been explored. In this work, the working pressure effect was thoroughly studied for the sputtered Sb<sub>2</sub>Se<sub>3</sub> thin film solar cells. High-quality Sb<sub>2</sub>Se<sub>3</sub> thin film was obtained when a bilayer structure was applied by sputtering the film at a high (1.5 Pa) and a low working pressure (1.0 Pa) subsequently. Such bilayer structure was found to be beneficial for both crystallization and preferred orientation of the Sb<sub>2</sub>Se<sub>3</sub> thin film. Lastly, an interesting power conversion efficiency (PCE) of 5.5% was obtained for the champion device.
topic thin film solar cell
sb<sub>2</sub>se<sub>3</sub>
magnetron sputtering
working pressure
post-selenization
substrate configuration
url https://www.mdpi.com/2079-4991/10/3/574
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