| Summary: | Magnetron sputtering has become an effective method in Sb<sub>2</sub>Se<sub>3</sub> thin film photovoltaic. Research found that post-selenization treatments are essential to produce stoichiometric thin films with desired crystallinity and orientation for the sputtered Sb<sub>2</sub>Se<sub>3</sub>. However, the influence of the sputtering process on Sb<sub>2</sub>Se<sub>3</sub> device performance has rarely been explored. In this work, the working pressure effect was thoroughly studied for the sputtered Sb<sub>2</sub>Se<sub>3</sub> thin film solar cells. High-quality Sb<sub>2</sub>Se<sub>3</sub> thin film was obtained when a bilayer structure was applied by sputtering the film at a high (1.5 Pa) and a low working pressure (1.0 Pa) subsequently. Such bilayer structure was found to be beneficial for both crystallization and preferred orientation of the Sb<sub>2</sub>Se<sub>3</sub> thin film. Lastly, an interesting power conversion efficiency (PCE) of 5.5% was obtained for the champion device.
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