Three-dimensional laser writing inside silicon using THz-repetition-rate trains of ultrashort pulses

Three-dimensional laser writing inside silicon remains today inaccessible with the shortest infrared light pulses unless complex schemes are used to circumvent screening propagation nonlinearities. Here, we explore a new approach irradiating silicon with trains of femtosecond laser pulses at repetit...

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Bibliographic Details
Main Authors: Wang Andong, Das Amlan, Grojo David
Format: Article
Language:English
Published: EDP Sciences 2020-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_12014.pdf