Three-dimensional laser writing inside silicon using THz-repetition-rate trains of ultrashort pulses
Three-dimensional laser writing inside silicon remains today inaccessible with the shortest infrared light pulses unless complex schemes are used to circumvent screening propagation nonlinearities. Here, we explore a new approach irradiating silicon with trains of femtosecond laser pulses at repetit...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2020-01-01
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Series: | EPJ Web of Conferences |
Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_12014.pdf |