III-V-on-Si photonic integrated circuits realized using micro-transfer-printing

Silicon photonics (SiPh) enables compact photonic integrated circuits (PICs), showing superior performance for a wide variety of applications. Various optical functions have been demonstrated on this platform that allows for complex and powerful PICs. Nevertheless, laser source integration technolog...

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Main Authors: Jing Zhang, Grigorij Muliuk, Joan Juvert, Sulakshna Kumari, Jeroen Goyvaerts, Bahawal Haq, Camiel Op de Beeck, Bart Kuyken, Geert Morthier, Dries Van Thourhout, Roel Baets, Guy Lepage, Peter Verheyen, Joris Van Campenhout, Agnieszka Gocalinska, James O’Callaghan, Emanuele Pelucchi, Kevin Thomas, Brian Corbett, António José Trindade, Gunther Roelkens
Format: Article
Language:English
Published: AIP Publishing LLC 2019-11-01
Series:APL Photonics
Online Access:http://dx.doi.org/10.1063/1.5120004
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spelling doaj-fa68af41d5e340cf9bbc4a85837a42dd2020-11-25T02:12:56ZengAIP Publishing LLCAPL Photonics2378-09672019-11-01411110803110803-1010.1063/1.5120004III-V-on-Si photonic integrated circuits realized using micro-transfer-printingJing Zhang0Grigorij Muliuk1Joan Juvert2Sulakshna Kumari3Jeroen Goyvaerts4Bahawal Haq5Camiel Op de Beeck6Bart Kuyken7Geert Morthier8Dries Van Thourhout9Roel Baets10Guy Lepage11Peter Verheyen12Joris Van Campenhout13Agnieszka Gocalinska14James O’Callaghan15Emanuele Pelucchi16Kevin Thomas17Brian Corbett18António José Trindade19Gunther Roelkens20Ghent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, Belgiumimec, Kapeldreef 75, 3001 Heverlee, Belgiumimec, Kapeldreef 75, 3001 Heverlee, Belgiumimec, Kapeldreef 75, 3001 Heverlee, BelgiumTyndall National Institute, University College Cork, Cork, IrelandTyndall National Institute, University College Cork, Cork, IrelandTyndall National Institute, University College Cork, Cork, IrelandTyndall National Institute, University College Cork, Cork, IrelandTyndall National Institute, University College Cork, Cork, IrelandX-Celeprint Limited, Cork, IrelandGhent University—imec, Technologiepark-Zwijnaarde 126, 9052 Ghent, BelgiumSilicon photonics (SiPh) enables compact photonic integrated circuits (PICs), showing superior performance for a wide variety of applications. Various optical functions have been demonstrated on this platform that allows for complex and powerful PICs. Nevertheless, laser source integration technologies are not yet as mature, hampering the further cost reduction of the eventual Si photonic systems-on-chip and impeding the expansion of this platform to a broader range of applications. Here, we discuss a promising technology, micro-transfer-printing (μTP), for the realization of III-V-on-Si PICs. By employing a polydimethylsiloxane elastomeric stamp, the integration of III-V devices can be realized in a massively parallel manner on a wafer without substantial modifications to the SiPh process flow, leading to a significant cost reduction of the resulting III-V-on-Si PICs. This paper summarizes some of the recent developments in the use of μTP technology for realizing the integration of III-V photodiodes and lasers on Si PICs.http://dx.doi.org/10.1063/1.5120004
collection DOAJ
language English
format Article
sources DOAJ
author Jing Zhang
Grigorij Muliuk
Joan Juvert
Sulakshna Kumari
Jeroen Goyvaerts
Bahawal Haq
Camiel Op de Beeck
Bart Kuyken
Geert Morthier
Dries Van Thourhout
Roel Baets
Guy Lepage
Peter Verheyen
Joris Van Campenhout
Agnieszka Gocalinska
James O’Callaghan
Emanuele Pelucchi
Kevin Thomas
Brian Corbett
António José Trindade
Gunther Roelkens
spellingShingle Jing Zhang
Grigorij Muliuk
Joan Juvert
Sulakshna Kumari
Jeroen Goyvaerts
Bahawal Haq
Camiel Op de Beeck
Bart Kuyken
Geert Morthier
Dries Van Thourhout
Roel Baets
Guy Lepage
Peter Verheyen
Joris Van Campenhout
Agnieszka Gocalinska
James O’Callaghan
Emanuele Pelucchi
Kevin Thomas
Brian Corbett
António José Trindade
Gunther Roelkens
III-V-on-Si photonic integrated circuits realized using micro-transfer-printing
APL Photonics
author_facet Jing Zhang
Grigorij Muliuk
Joan Juvert
Sulakshna Kumari
Jeroen Goyvaerts
Bahawal Haq
Camiel Op de Beeck
Bart Kuyken
Geert Morthier
Dries Van Thourhout
Roel Baets
Guy Lepage
Peter Verheyen
Joris Van Campenhout
Agnieszka Gocalinska
James O’Callaghan
Emanuele Pelucchi
Kevin Thomas
Brian Corbett
António José Trindade
Gunther Roelkens
author_sort Jing Zhang
title III-V-on-Si photonic integrated circuits realized using micro-transfer-printing
title_short III-V-on-Si photonic integrated circuits realized using micro-transfer-printing
title_full III-V-on-Si photonic integrated circuits realized using micro-transfer-printing
title_fullStr III-V-on-Si photonic integrated circuits realized using micro-transfer-printing
title_full_unstemmed III-V-on-Si photonic integrated circuits realized using micro-transfer-printing
title_sort iii-v-on-si photonic integrated circuits realized using micro-transfer-printing
publisher AIP Publishing LLC
series APL Photonics
issn 2378-0967
publishDate 2019-11-01
description Silicon photonics (SiPh) enables compact photonic integrated circuits (PICs), showing superior performance for a wide variety of applications. Various optical functions have been demonstrated on this platform that allows for complex and powerful PICs. Nevertheless, laser source integration technologies are not yet as mature, hampering the further cost reduction of the eventual Si photonic systems-on-chip and impeding the expansion of this platform to a broader range of applications. Here, we discuss a promising technology, micro-transfer-printing (μTP), for the realization of III-V-on-Si PICs. By employing a polydimethylsiloxane elastomeric stamp, the integration of III-V devices can be realized in a massively parallel manner on a wafer without substantial modifications to the SiPh process flow, leading to a significant cost reduction of the resulting III-V-on-Si PICs. This paper summarizes some of the recent developments in the use of μTP technology for realizing the integration of III-V photodiodes and lasers on Si PICs.
url http://dx.doi.org/10.1063/1.5120004
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