The influence of deposition temperature on vanadium dioxide thin films microstructure and physical properties
Vanadium dioxide thin films were successfully prepared on soda lime glass substrates using the optimised conditions for r.f-inverted cylindrical magnetron sputtering. The optimised deposition parameters were fixed and then a systematic study of the effect of deposition temperature, ranging from 45...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Academy of Science of South Africa
2010-11-01
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| Series: | South African Journal of Science |
| Subjects: | |
| Online Access: | https://www.sajs.co.za/article/view/10102 |
| Summary: | Vanadium dioxide thin films were successfully prepared on soda lime glass substrates using the optimised conditions for r.f-inverted cylindrical magnetron sputtering. The optimised deposition parameters were fixed and then a systematic study of the effect of deposition temperature, ranging from 450 °C to 550 °C, on the microstructure of thermochromic thin films was carried out. The deposited films were found to be well crystallised, showing strong texture corresponding to the (011) plane, indicating the presence of vanadium dioxide. |
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| ISSN: | 1996-7489 |