A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs

A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs

This paper presents a high-accuracy complementary metal oxide semiconductor (CMOS) driven ultrasonic ranging system based on air coupled aluminum nitride (AlN) based piezoelectric micromachined ultrasonic transducers (PMUTs) using time of flight (TOF). The mode shape and the time-frequency character...

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Bibliographic Details
Main Authors:	Yihsiang Chiu, Chen Wang, Dan Gong, Nan Li, Shenglin Ma, Yufeng Jin
Format:	Article
Language:	English
Published:	MDPI AG 2021-03-01
Series:	Micromachines
Subjects:	aluminum nitride piezoelectric micromachined ultrasonic transducers ranging time of flight (TOF) time to digital converter circuit (TDC)
Online Access:	https://www.mdpi.com/2072-666X/12/3/284

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