Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser

We study the influence of a laser beam’s image-plane position relative to the processed surface for the deep-hole, laser-microdrilling of soda-lime glass with an excimer 308-nm laser and mask-projection technique. It is demonstrated that the image-plane position has a significant influence on the ho...

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Bibliographic Details
Main Author:	Ales Babnik
Format:	Article
Language:	English
Published:	Maejo University 2013-01-01
Series:	Maejo International Journal of Science and Technology
Subjects:	laser processing excimer laser mask-projection technique glass micro-drilling hole geometry
Online Access:	http://www.mijst.mju.ac.th/vol7/48-59.pdf

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record_format	Article
spelling	doaj-f807b00873cf45cfa57228d95ddc14b92020-11-24T22:59:56ZengMaejo UniversityMaejo International Journal of Science and Technology1905-78732013-01-017014859Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laserAles BabnikWe study the influence of a laser beam’s image-plane position relative to the processed surface for the deep-hole, laser-microdrilling of soda-lime glass with an excimer 308-nm laser and mask-projection technique. It is demonstrated that the image-plane position has a significant influence on the hole’s tapering and final depth. Holes with exit diameters up to 10 times smaller than the mask-image diameter are produced in the case of perforation during the appropriate process phase determined by the formation of the plasma plume. http://www.mijst.mju.ac.th/vol7/48-59.pdflaser processingexcimer lasermask-projection techniqueglass micro-drillinghole geometry
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Ales Babnik
spellingShingle	Ales Babnik Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser Maejo International Journal of Science and Technology laser processing excimer laser mask-projection technique glass micro-drilling hole geometry
author_facet	Ales Babnik
author_sort	Ales Babnik
title	Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser
title_short	Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser
title_full	Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser
title_fullStr	Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser
title_full_unstemmed	Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser
title_sort	influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser
publisher	Maejo University
series	Maejo International Journal of Science and Technology
issn	1905-7873
publishDate	2013-01-01
description	We study the influence of a laser beam’s image-plane position relative to the processed surface for the deep-hole, laser-microdrilling of soda-lime glass with an excimer 308-nm laser and mask-projection technique. It is demonstrated that the image-plane position has a significant influence on the hole’s tapering and final depth. Holes with exit diameters up to 10 times smaller than the mask-image diameter are produced in the case of perforation during the appropriate process phase determined by the formation of the plasma plume.
topic	laser processing excimer laser mask-projection technique glass micro-drilling hole geometry
url	http://www.mijst.mju.ac.th/vol7/48-59.pdf
work_keys_str_mv	AT alesbabnik influenceoflaserbeamsimageplanepositionongeometryofthroughholesinpercussiondrilledglassusingexcimerlaser
_version_	1725643187989512192

Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser

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