Influence of laser beam’s image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser
We study the influence of a laser beam’s image-plane position relative to the processed surface for the deep-hole, laser-microdrilling of soda-lime glass with an excimer 308-nm laser and mask-projection technique. It is demonstrated that the image-plane position has a significant influence on the ho...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Maejo University
2013-01-01
|
| Series: | Maejo International Journal of Science and Technology |
| Subjects: | |
| Online Access: | http://www.mijst.mju.ac.th/vol7/48-59.pdf |
| Summary: | We study the influence of a laser beam’s image-plane position relative to the processed surface for the deep-hole, laser-microdrilling of soda-lime glass with an excimer 308-nm laser and mask-projection technique. It is demonstrated that the image-plane position has a significant influence on the hole’s tapering and final depth. Holes with exit diameters up to 10 times smaller than the mask-image diameter are produced in the case of perforation during the appropriate process phase determined by the formation of the plasma plume. |
|---|---|
| ISSN: | 1905-7873 |