Study on a New Method for Improving Resolution of Grating Interferometer Displacement Measuring System

Study on a New Method for Improving Resolution of Grating Interferometer Displacement Measuring System

A method for improving resolution of grating interferometer displacement measuring system is developed in this paper. The measurement system consists of a grating interferometer and a phase-shift device. Two interference fringes are required in the detecting field of photoelectric sensor. If we chan...

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Bibliographic Details
Main Authors: Shi Lun, Wang He, Wang Chi-Ping, Chen Jia-Bao
Format: Article
Language:English
Published: EDP Sciences 2016-01-01
Series:MATEC Web of Conferences
Subjects:
Grating interferometer
phase shift
displacement
Online Access:http://dx.doi.org/10.1051/matecconf/20164202001

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