Study on a New Method for Improving Resolution of Grating Interferometer Displacement Measuring System
A method for improving resolution of grating interferometer displacement measuring system is developed in this paper. The measurement system consists of a grating interferometer and a phase-shift device. Two interference fringes are required in the detecting field of photoelectric sensor. If we chan...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2016-01-01
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| Series: | MATEC Web of Conferences |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1051/matecconf/20164202001 |