Low-order Damping and Tracking Control for Scanning Probe Systems

Low-order Damping and Tracking Control for Scanning Probe Systems

This article describes an improvement to integral resonance damping control (IRC) for reference tracking applications such as Scanning Probe Microscopy and nanofabrication. It is demonstrated that IRC control introduces a low-frequency pole into the tracking loop which is detrimental for performance...

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Bibliographic Details
Main Authors: Andrew J Fleming, Yik Ren eTeo, Kam K Leang
Format: Article
Language:English
Published: Frontiers Media S.A. 2015-11-01
Series:Frontiers in Mechanical Engineering
Subjects:
tracking control
Low order
Damping control
Scsanning probe microscope
integral resonance control
Online Access:http://journal.frontiersin.org/Journal/10.3389/fmech.2015.00014/full

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